Comparison ledger
AJA A3CV, Applied Materials 0010-13622 RF Match for, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | A3CVAJA | 0010-13622 RF Match forApplied Materials |
|---|---|---|
| OEM | AJA | Applied Materials |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | AJA A3CV | Applied Materials 0010-13622 RF Match for |
| Cited variants | — | |
| Specifications | ||
| Source series | A3CV series[1] | — |
| Type | magnetron sputtering sources[1] | — |
| Mounting versions | HV and UHV mounting versions[1] | — |
| Compatibility | RF and DC compatible[1] | — |
| Target architecture | multiple target modules onto a common source head subassembly[1] | — |
| Target sizes mentioned | large magnetic, small precious metal, standard size, and custom size targets[1] | — |
| Optional features | gas injection chimneys, source head tilt gimbals, integral shutters, and power supplies[1] | — |
| Magnet array | AJA modular magnet array[1] | — |
| source type | magnetron sputtering sources[1] | — |
| module flexibility | fits multiple target modules onto a common source head subassembly[1] | — |
| magnet array | unique modular magnet array[1] | — |
| RF and DC compatibility | Yes[1] | — |
| Integral gas injection chimneys | Optional[1] | — |
| Source head tilt gimbals | Optional[1] | — |
| Integral shutters | Optional[1] | — |
| Power supplies | Optional[1] | — |
| Modular magnet array | Yes[1] | — |
| Configuration | — | High Efficiency HE RF Match-Bias[2] |
| Model | — | 0010-13622[2] |
| Product Type | — | RF Match for PVD (Physical Vapor Deposition)[2] |
| Feature | — | High Efficiency HE RF Match-Bias[2] |
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