Waferpedia

Comparison ledger

1000 Familyversus1700

Ultratech 1000 Family, Ultratech 1700, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1000 FamilyUltratech
1700Ultratech
OEMUltratechUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyUltratech 1000 FamilyUltratech 1700
Specifications
Tool typePhotolithography step-and-repeat 1X stepper[1]—
Optical designWynne Dyson[1]—
Magnification1X[1]—
Typical Resolution—1 μm[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org
  2. [2]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu