Comparison ledger
Ultratech 1000 Family, Ultratech 1500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | 1500Ultratech |
|---|---|---|
| OEM | Ultratech | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | Wafer loader |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Ultratech 1000 Family | Ultratech 1500 |
| Specifications | ||
| Tool type | Photolithography step-and-repeat 1X stepper[1] | — |
| Optical design | Wynne Dyson[1] | — |
| Magnification | 1X[1] | — |
| Configuration | — | 50/60 Hz[2] |
| Wafer size | — | Wafer loader[2] |
| Power | — | 50/60 Hz, 12 Amp[2] |
| Wafer loader | — | Yes[2] |
| Numerical aperture | — | 0.32 NA[3] |
| Exposure source | — | Broadband, gh-line[3] |
| Vintage | — | 2000[2] |
| Illumination | — | Broadband[3] |
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