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-Mist 850 Electronic Air Filterversus253B-20-40-2

Tri -Mist 850 Electronic Air Filter, YES 253B-20-40-2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMTriYES
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyTri -Mist 850 Electronic Air FilterYES 253B-20-40-2
Cited variants—
  • 253B-20-40-1[1]
Specifications
Model—253B-20-40-2[1]
Type—Exhaust Throttle Valve[1]
Valve mechanism—butterfly valve[1]
Controller compatibility—Type 651, 652, 152G, or 252 (revision D or later) controllers[1]
Flange types available—ASA, KF Style ISO, NW Style ISO, CF, and JIS[1]
Inside diameter—0.779 in (19.8 mm)[1]
Mounting flange—KF-40[1]
Outside diameter—2.75 in (69.9 mm) unheated; 3.00 in (76.2 mm) with heater option[1]
Controllable conductance—0.25 to 31 l/sec[1]
Closed leakage—<10^-7 Torr l/sec[1]
Flapper seal—None[1]
Thickness—2.25 in (57.2 mm)[1]
Overall height—8.64 in (219.5 mm) unheated; 8.81 in (223.8 mm) with heater option[1]
Number of bolt holes—N/A[1]
Bolt hole diameter—N/A[1]
Bolt circle diameter—N/A[1]
Flange O-ring groove ID—N/A[1]
Valve body operating temperature—0° to 90° C (32° to 194° F) max.[1]
Valve motor ambient operating temperature—0° to 70° C (32° to 158° F) max.[1]
Speed (open to close)—7.5 sec[1]
Power input—±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[1]
Nominal Inside Diameter—0.779 in (20 mm)[2]
Flange Size—NW40[2]
Flange Type—ISO-KF (KF Style ISO)[2]
Flapper O-ring—No[2]
External Leak Rate—1 x 10^-8 scc/sec He[2]
Closed Leakage—< 1 x 10^-7 Torr l/s[2]
Controllable Conductance (min)—0.25 l/sec[1]
Controllable Conductance (max)—31 l/sec[1]
Valve Speed (standard)—7.5 sec open to close[2]
Resolution (standard)—1/10,000[2]
Drive—Mechanical (non belt) drive with integral cosine generator[2]
Differential Pressure Across Valve—1 Atmosphere (15 psig)[2]
Maximum Valve Body Operating Temperature—0 - 90°C[2]
Valve Motor Ambient Operating Temperature—0 - 70°C max[2]
Exposed Materials—316 stainless steel and seal material[2]
Thickness (C)—2.25 inches (57.2 mm)[1]
Overall Height (unheated)—8.64 inches (219.5 mm)[1]
Overall Height (with heater option)—8.81 inches (223.8 mm)[1]
Closed Leakage (sealing version -1)—< 10^-7 Torr l/sec[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]mks.commks.com