Comparison ledger
Tokyo Electron Lithius i+, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Lithius i+Tokyo Electron | 1000 FamilyUltratech |
|---|---|---|
| OEM | Tokyo Electron | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Lithius i+ | Ultratech 1000 Family |
| Specifications | ||
| OEM | Tokyo Electron, Ltd. (TEL)[1] | — |
| Model | Lithius i+[2] | — |
| Full designation | CLEAN TRACK LITHIUS i+[1] | — |
| Product type | Coater / Developer[2] | — |
| Product descriptor | High Reliability and Productivity Coater Developer (5C/5D)[3] | — |
| Wafer size | 300 mm[3] | — |
| Wafer size (imperial) | 12 inch[2] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[5] |
| Optical design | — | Wynne Dyson[5] |
| Magnification | — | 1X[5] |
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