Waferpedia

Comparison ledger

MJB55versus1000 Family

SUSS MicroTec MJB55, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
MJB55SUSS MicroTec
1000 FamilyUltratech
OEMSUSS MicroTecUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced1975—
Production run1975–—
LifecycleMature—
Lifecycle milestones——
Control system——
Generation——
FamilySUSS MicroTec MJB55Ultratech 1000 Family
Specifications
TypeMask aligner[1]—
ApplicationPhotolithography[1]—
Target marketMass production[1]—
Tool type—Photolithography step-and-repeat 1X stepper[2]
Optical design—Wynne Dyson[2]
Magnification—1X[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org
  2. [2]en.wikipedia.orgen.wikipedia.org