Comparison ledger
SUSS MicroTec MA 6 Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA 6 MaskSUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec MA 6 Mask | Ultratech 1000 Family |
| Specifications | ||
| Configuration | 1000 Watt Power Supply[1] | — |
| Voltage | 230 V[2] | — |
| UV lamp power supply | CIC1200/157308LS[3] | — |
| Wafer Sizes | 2, 3, 4, 5, 6, 12 inch[2] | — |
| Resolution | 1 Micron on 6 inch wafers[1] | — |
| Power Supply | 1000 Watt[1] | — |
| Illumination | IR Back Side Illumination[1] | — |
| Microscope | Split Field Microscope with 6 Objectives[1] | — |
| Alignment | Infrared Alignment[2] | — |
| Topside Alignment Objectives | MplanFL N 5x/0.15, MplanFL N 10x/0.30, LMPlanFL N 20x/0.40[3] | — |
| Air Chuck | 7-inch[3] | — |
| Voltage / Frequency | 200-240V, 50/60Hz[3] | — |
| Make | SUSS[4] | — |
| Model | MA 6[4] | — |
| Product Details | up to 6" - 50/60 Hz - 230 V - HDD - Software - with Infrared Alignment - No BSA 2001 Vintage[2] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[5] |
| Optical design | — | Wynne Dyson[5] |
| Magnification | — | 1X[5] |
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