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Comparison ledger

SHX Ionversus160 XP Ion

Sumitomo SHX Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
SHX IonSumitomo
160 XP IonVarian
OEMSumitomoVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySumitomo SHX IonVarian 160 XP Ion
Specifications
ConfigurationWith:[1]150mm High Current IMP[2]
OEM—Varian[3]
Model—160 XP Ion[3]
Category—Ion Implantation[2]
Tool type—ion implanter[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing