Comparison ledger
SPTS CPX Pegasus, Tegal 90 X, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CPX PegasusSPTS | 90 XTegal |
|---|---|---|
| OEM | SPTS | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SPTS CPX Pegasus | Tegal 90 X |
| Specifications | ||
| Configuration | 2 Chambers[2] | Dry Etch[5] |
| Frequency | 60Hz[2] | — |
| Source RF Generator | MKS 6.5 kw RF Power Generator[2] | — |
| Platen RF Generator | MKS/ENI ACG 3B 13.56MHz RF Generator[2] | — |
| Rotary Pump | 3 PCS[2] | — |
| Turbo pump | 2 PCS[2] | — |
| DI Water | SMC HRZ-L2-DY chiller[2] | — |
| Silicon oil | SMC HRZL-D chiller[2] | — |
| Manufacturer | SPTS / STS (also listed under KLA / SPTS)[2] | — |
| Wafer Size | 8 inch (200 mm)[2] | — |
| Wafer Size (alternate) | 200 mm[3] | — |
| Number of Chambers | 2[2] | — |
| Voltage | 380 Volts[2] | — |
| Voltage (alternate) | 400 Volts[3] | — |
| Current | 160 Amps[2] | — |
| RF Source Generator | MKS 6.5 kW RF Power Generator[2] | — |
| RF Platen Generator | MKS/ENI ACG 3B 13.56MHz RF Generator[2] | — |
| Rotary Pump Quantity | 3 PCS[2] | — |
| Turbo Pump Quantity | 2 PCS[2] | — |
| Pressure System Components | MKS Baratron gauge (10-4~10-1 m Torr), MKS 750 capacitance (10-760 Torr), BOC EDWARDS Active gauge (10-4mTorr~10Torr), ESC (ceramic)[2] | — |
| Gases Supported | SF6, C4F8, O2, N2, Ar[2] | — |
| Gas Flow Rates | C4F8 400 sccm, SF6 1200 sccm, Ar 500 sccm, O2 200 sccm[2] | — |
| Wafer Handling Robot | Brooks MagnaTran 7[2] | — |
| Cooling/Heating Systems | House Water, DI Water chiller (SMC HRZ-L2-DY), Silicon oil chiller (SMC HRZL-D), Insert Heaters[2] | — |
| Platform | CPX[3] | — |
| Module | Pegasus[3] | — |
| Database Version | 4.16[3] | — |
| Installation Type | Thru-Wall[3] | — |
| Wafer Flat Orientation | Round with notch[3] | — |
| Clamp Type | TDESC[3] | — |
| MFCs | MKS[3] | — |
| Pump Type | EDWARDS[3] | — |
| Cluster Transfer Pump | ALCATEL[3] | — |
| Dry Pumps | 1-DS80, 2-DS700[4] | — |
| Chillers | 1-HRZ001-L2-DV, 2-HRZ001-L-D[4] | — |
| Software | DSIE CP0148[4] | — |
| Gasbox | Peg/HRM[3] | — |
| EPD (End Point Detection) | No[3] | — |
| Vintage Year | 2006[2] | — |
| Vintage Year (alternate) | 2012[3] | — |
| SF6 | Purity 99.999%(5N)[2] | — |
| C4F8 | Purity 99.999%(5N)[2] | — |
| O2 | Purity 99.9995%(5N5)[2] | — |
| N2 | Purity 99.9995%(5N5)[2] | — |
| Ar | Purity 99.9995%(5N5)[2] | — |
| OEM | — | Tegal[5] |
| Model | — | 90 X[5] |
| Tool type | — | Plasma Etcher[5] |
| Process type | — | Dry Etch[5] |
| Related description | — | non-critical etch tool[1] |
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