Waferpedia

Comparison ledger

CM 210versus11401 Oscilloscope

Signatone CM 210, Tektronix 11401 Oscilloscope, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
CM 210Signatone
OEMSignatoneTektronix
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySignatone CM 210Tektronix 11401 Oscilloscope
Specifications
Chuck XY Stage Travel Range205 mm x 205 mm (8.07 x 8.07 in)[1]—
Chuck XY Travel Resolution (Standard)14 μm Per Degree of Knob Rotation[1]—
Chuck XY Travel Resolution (Fine)1.5 μm Per Degree of Knob Rotation[1]—
Chuck Z Stage Travel Range2.5 mm (0.01 in)[1]—
Chuck Z Stage Repeatability± 1.0 μm[1]—
Chuck Theta Stage Travel Range± 11° (22°)[1]—
Chuck Theta Stage Accuracy< 1.0 μm (measured at the edge of the 200 mm chuck)[1]—
Probe Platen MaterialNickel Plated Steel (Aluminum optional)[1]—
Probe Platen DimensionsL = 580mm x W = 637mm x H = 12.7mm[1]—
Max Number of Micro Positioners10x DC/HV or 2x RF + 4x DC or 4x RF + 2x DC or 2x CAP + 4x DC[1]—
Contact Repeatability< 1 μm (0.04 mils) by Manual Control[1]—
Standard Wafer Chuck Diameter203 mm[1]—
Standard Wafer Chuck Surface Planarity±6.5 μm[1]—
Standard Wafer Chuck Rigidity<3 μm / 10N at edge of the chuck[1]—
Coax Chuck Operation Voltage-200V to +200V DC[1]—
Coax Chuck Max Voltage (Chuck to GND)500 V DC[1]—
Coax Chuck Isolation> 150 GΩ[1]—
Triax Chuck Isolation (Force to Guard @ 10V)> 2 TΩ[1]—
System Dimensions (Optional Table)660 x 889 x 610 mm (26 x 35 x 24 in)[2]—
System Weight (Optional Table)109 kg (240 lbs)[2]—
System Dimensions Including Table863 x 1085 x 1370 mm (34 x 42.7 x 53.95 in)[2]—
System Weight Including Table385 kg (849 lbs)[2]—
Available Thermal Chuck OptionsStandard Hot (25°C to 300°C), Hot/Triax (25°C to 200°C), Hot/3kV Triax (25°C to 200°C)[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]signatone.comsignatone.com
  2. [2]microworld.eumicroworld.eu