Comparison ledger
Semitool Scepter SCE A 311, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scepter SCE A 311Semitool | 1512eTegal |
|---|---|---|
| OEM | Semitool | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool Scepter SCE A 311 | Tegal 1512e |
| Specifications | ||
| OEM | Semitool[1] | — |
| Model | Scepter SCE A 311[1] | — |
| Equipment type | Wet Etcher[1] | — |
| Description | Wet Etcher – Acid Spray[2] | — |
| Wafer size | 8 inch[1] | — |
| Version | 200mm[2] | — |
| Vintage | 2001[1] | — |
| Date of manufacture | 2001[3] | — |
| Software revision | SAAB 3.1[3] | — |
| Serial number | G191108[3] | — |
| Location | Nijmegen[3] | — |
| Condition | As Is[3] | — |
| Wafer Size | 200 mm (8 inch)[1] | — |
| Process Type | Wet Etcher – Acid Spray[2] | — |
| Vintage (Year of Manufacture) | 2001[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[4] |
| Stated configuration | — | With modules assembly for CI-4222[4] |
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