Comparison ledger
Semitool 421 Spray Solvent, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 421 Spray SolventSemitool | 1000PYES |
|---|---|---|
| OEM | Semitool | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | Batch Solvent Processor for Wafer Cleaning | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 421 | YES 1000P |
| Cited variants |
| — |
| Specifications | ||
| Process Applications | Polymer Removal, Resist Stripping, Wafer Cleaning, Metal Lift-Off[2] | — |
| Wafer size | Batch Solvent Processor for Wafer Cleaning[2] | — |
| Max Wafer Size | 8"/200mm Wafers[2] | — |
| Configuration | Single Chamber[2] | Parallel plate[5] |
| Chamber Type | Single Chamber[2] | — |
| Number of Tanks | 4[2] | — |
| Heated Tanks | 2[2] | — |
| Ambient Tanks | 2[2] | — |
| Rotor Included | 1[2] | — |
| Max Wafers per Batch | 50 wafers[3] | — |
| Vintage | 2004[2] | — |
| Wafer Size | 200 mm[1] | — |
| Model | — | 1000P[4] |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Power | — | 1000 W[5] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
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