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11600 SRDversus603 Plate

Semitool 11600 SRD, Ultratech 603 Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
603 PlateUltratech
OEMSemitoolUltratech
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 11600 SRDUltratech 603 Plate
Specifications
ConfigurationCeramic[1]—
ManufacturerSemitool[1]Ultratech[2]
Model11600 SRD[1]603 Plate[3]
Equipment typeSpin Rinse Dryer[1]—
Category—Wet Processing / Clean[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing