Comparison ledger
SCREEN WS 820 L, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WS 820 LSCREEN | 1512eTegal |
|---|---|---|
| OEM | SCREEN | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1996 Vintage · 1997 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN WS 820 L | Tegal 1512e |
| Specifications | ||
| Configuration | SiN Wet Etching[1] | — |
| Chemical | H3PO4 , IPA , HF[1] | — |
| PLC (Loader / Unloader) | Mitsubishi A3A CPU P21[1] | — |
| Olifra | wafer flatzone[1] | — |
| Main PC | Mitsubishi/LM (hard disket OK)[1] | — |
| Signal Tower | 3 color (GYR) Patlite lamp type[1] | — |
| Phase | 3 Phase, 208V, 170a, 100V[1] | — |
| Left/ Right Stepping Motor (Oriental | VEXTA A 6259)[1] | — |
| Up/Down Stepping Motor (Oriental | VEXTA PK 596 H[1] | — |
| Wafer Size | 8 inch[1] | — |
| Process | SiN wet etching, nitride strip[1] | — |
| Chemicals | H3PO4, IPA, HF[1] | — |
| Transfer Type | Rear type transfer flow[1] | — |
| IPA Dryer Fire Extinguisher | Yes[1] | — |
| PLC | Mitsubishi A3A CPU P21[1] | — |
| Wafer Flatzone | Olifra[1] | — |
| Front Carrier Detector Sensor | Yes[1] | — |
| Power | 3 Phase, 208V, 170A, 100V[1] | — |
| Carrier Loading | 2 carrier loading (stocker 8 carrier loading)[1] | — |
| Stepping Motors (Left/Right) | Oriental VEXTA A 6259[1] | — |
| Stepping Motors (Up/Down) | Oriental VEXTA PK 596 H[1] | — |
| Measuring Units | H3PO4 measuring tank, DIW measuring tank, H3PO4 DIW spiking pump, HF measuring tank[1] | — |
| Resistivity Meter | DKK AQ 10 (Final Rinse)[1] | — |
| Circulation Heater | In-Line Heater[1] | — |
| Circulation Pump | FS 30 HT 2[1] | — |
| Circulation Filter | High Temp Filter[1] | — |
| Aspirator Drain | Yes[1] | — |
| Pump | FS 30 HT 2[1] | — |
| Filter | High Temp Filter[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
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