Comparison ledger
Oxford Instruments Plasmalab 80 Plus, Tegal 980, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Plasmalab 80 PlusOxford Instruments | 980Tegal |
|---|---|---|
| OEM | Oxford Instruments | Tegal |
| Category | Etch | Etch |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments Plasmalab 80 | Tegal 980 |
| Cited variants | — | |
| Specifications | ||
| Tool ID | DE-04[2] | — |
| Type | Reactive Ion Etching (RIE)[2] | — |
| Design | compact open-loading tool[2] | — |
| RF generator | 600W[2] | — |
| Wafer capacity | up to 200mm wafers[2] | — |
| Process gases | CF4, Ar, O2, SF6, CHF3[2] | — |
| Suitability | R&D or small-scale production[2] | — |
| RF power | 600W[2] | — |
| Maximum wafer size | 200mm[2] | — |
| Tool type | Reactive Ion Etching (RIE)[2] | — |
| Wafer size | Up to 200mm[2] | 200mm[1] |
| Loading type | Open load[2] | — |
| -Process | PECVD | — |
| -Voltage | 208 VAC, 3 Phase | — |
| -Equipment component | Main body | — |
| Description | Open load reactive ion etch system[3] | — |
| Wafer size designed for | 100 mm[3] | — |
| Wafer size maximum | 200 mm[3] | — |
| Platen size | 238 mm[3] | — |
| Power range | < 270 W[3] | — |
| Etch targets | Compound semiconductors and metals[3] | — |
| Series name | — | 980 ACS Series[1] |
| Process type | — | Plasma etch[1] |
| System type | — | Single wafer cassette-to-cassette etch system[1] |
| Throughput | — | Faster throughput[1] |
| Calibration | — | Faster system calibration[1] |
| User interface | — | Touchscreen graphical user interface[1] |
| Data handling | — | Integrated data logging[1] |
| Factory automation | — | Factory automation support[1] |
| Tool format | — | Single wafer cassette-to-cassette etch system[1] |
| System calibration | — | Faster system calibration[1] |
| Automation | — | Factory automation support[1] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →