Comparison ledger
Oxford Instruments 100 ICP Fluorine, SPTS Primaxx Xactix, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100 ICP FluorineOxford Instruments | Primaxx XactixSPTS |
|---|---|---|
| OEM | Oxford Instruments | SPTS |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Oxford Instruments 100 ICP Fluorine | SPTS Primaxx Xactix |
| Specifications | ||
| Etch Gases | SF6, CF4, O2, Ar, N2, CHF3, C4F8[1] | — |
| Cryo DRIE etch rate | up to 5 µm/min[1] | — |
| Wafer size | 4 inch, 6 inch, 8 inch (with clamp change)[1] | 6 inch[2] |
| Frequency | — | 60 Hz[2] |
| Configuration | — | 230/115 Volts[2] |
| Phase | — | 1 Phase[2] |
| Tool type | — | Etcher[2] |
| Power | — | 60 Hz, 230/115 Volts, 1 Phase[2] |
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