Comparison ledger
OAI 806 Mask, SUSS MicroTec MA 6 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 806 MaskOAI | MA 6 MaskSUSS MicroTec |
|---|---|---|
| OEM | OAI | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | OAI 806 Mask | SUSS MicroTec MA 6 Mask |
| Cited variants |
| — |
| Specifications | ||
| Wafer size | 6 inch[3] | — |
| Model | 806[3] | MA 6[8] |
| Model variant | MBA 806[2] | — |
| Alignment accuracy | submicron[4] | — |
| Light source | collimated UV light source, 350W NUV lamphouse[4] | — |
| Workholding | vacuum chuck[4] | — |
| Microscope | integrated microscope optics with 5x objectives[4] | Split Field Microscope with 6 Objectives[5] |
| Stage | motorized stage with Thomson Industries Quickslide System[2] | — |
| Contact modes | soft, hard, and proximity contact[4] | — |
| Backside alignment | optional[4] | — |
| Wafer loading | manual[2] | — |
| Mask holders | 4 inch (3 inch round opening), 5 inch (4 inch round opening), 7 inch (6 inch round opening)[2] | — |
| BSA chucks | 3 inch, 4 inch, and 6 inch[2] | — |
| OEM | OAI[3] | — |
| Tool type | Mask Aligner[3] | — |
| Exposure modes | soft contact, hard contact, and proximity contact modes[4] | — |
| Optical source | collimated UV light source[4] | — |
| Alignment optics | integrated microscope optics[4] | — |
| Model designation | MBA806[2] | — |
| Manual wafer load | manual wafer load mask aligner[2] | — |
| Lamphouse | 350W NUV lamphouse[2] | — |
| Microscope light power supply | included[2] | — |
| Objectives | 5x objectives[2] | — |
| System | Thomson Industries Quickslide System[2] | — |
| Configuration | — | 1000 Watt Power Supply[5] |
| Voltage | — | 230 V[6] |
| UV lamp power supply | — | CIC1200/157308LS[7] |
| Wafer Sizes | — | 2, 3, 4, 5, 6, 12 inch[6] |
| Resolution | — | 1 Micron on 6 inch wafers[5] |
| Power Supply | — | 1000 Watt[5] |
| Illumination | — | IR Back Side Illumination[5] |
| Alignment | — | Infrared Alignment[6] |
| Topside Alignment Objectives | — | MplanFL N 5x/0.15, MplanFL N 10x/0.30, LMPlanFL N 20x/0.40[7] |
| Air Chuck | — | 7-inch[7] |
| Voltage / Frequency | — | 200-240V, 50/60Hz[7] |
| Make | — | SUSS[8] |
| Product Details | — | up to 6" - 50/60 Hz - 230 V - HDD - Software - with Infrared Alignment - No BSA 2001 Vintage[6] |
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