Comparison ledger
Nikon NSR 2005 i 11 D i-Line, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | |
|---|---|---|
| OEM | Nikon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | Wafer Loader | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nikon NSR 2005 | Ultratech 1000 Family |
| Specifications | ||
| Illumination WL | i-line[1] | — |
| Illumination uniformity | 2.00%[1] | — |
| CD unifotmity | 400nm[1] | — |
| Overlay (single machine) | 70nm[1] | — |
| Reticle size | 5"[1] | — |
| Lens reduction | 1/5[1] | — |
| Control System | VAX Station[2] | — |
| Configuration | Modules:[3] | — |
| Wafer size | Wafer Loader[2] | — |
| AC Power Distribution System | Electricity Box[3] | — |
| Manufacturer | Nikon[2] | — |
| Model | NSR 2005 i 11 D[2] | — |
| Category | Lithography[2] | — |
| CD uniformity | 400nm[1] | — |
| Modules | Operation Panel; Retical Loader; Wafer Loader; Lens Controller; AC Power Distribution System: Electricity Box[3] | — |
| Vintage | 1996[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[4] |
| Optical design | — | Wynne Dyson[4] |
| Magnification | — | 1X[4] |
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