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Comparison ledger

05 LHP 151versusAccent / Bio-Rad QS 2200 A Automated FT-IR

Melles Griot 05 LHP 151, Onto Innovation Accent / Bio-Rad QS 2200 A Automated FT-IR, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
05 LHP 151Melles Griot
OEMMelles GriotOnto Innovation
CategoryPrecision OpticsPrecision Optics
Wafer size—Dual cassette wafer handling
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMelles Griot 05Onto Innovation Accent
Specifications
ConfigurationWith 05 LPL 340 Power Supply (Does not power on)[1]Si epi, SiN[3]
Equipment typeLaser[1]—
MakeMelles Griot[1]—
Model05 LHP 151[1]QS 2200 A[3]
Power stateDoes not power on[1]—
Wafer size—Dual cassette wafer handling[3]
Voltage—120V, 1Ph., 10A, 50/60 Hz[3]
Type—Automated FT-IR Spectrometer[3]
Wafer sizes—4, 5, 6, 8 inch[3]
Wafer handling—Dual cassette wafer handling[3]
Wafer range—100mm – 200mm wafers[3]
Beamsplitter—Potassium Bromide (KBr)[3]
Robot—GENMARK 3 Axis Robot with Integrated Flat Finder & Controller[3]
Robot interface—Accent Robot Interface[3]
Stage controller—Accent 013-4738-2 Stage Controller[3]
AC power box—Accent 013-4758-2 AC Power Box[3]
Control software—Windows XP[3]
GUI application software—Accent GUI Application Software[3]
Interface software—SECS/GEM Interface Software[3]
Monitor—19” Color Flatscreen Monitor[3]
Power requirements—120V, 1Ph., 10A, 50/60 Hz[3]
Measurement mode—Configured for reflective measurements only[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing