Waferpedia

Comparison ledger

PM5versus100R16

Logitech PM5, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PM5Logitech
100R16Strasbaugh
OEMLogitechStrasbaugh
CategoryCMPCMP
Wafer size100mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLogitech PM5Strasbaugh 100R16
Specifications
ManufacturerLogitech[1]—
ModelPM5[1]—
ApplicationPolishing and lapping[1]—
Abrasive autofeed cylinder compatibilityAbrasive autofeed cylinder for use with a Logitech PM5 or LP50 system[2]—
Sample wafer size4 inch (100mm) or smaller[3]—
Power supply voltageSingle phase AC100V[3]—
Machine typeLapping and polishing system[3]—
Number of workstationsSingle[4]—
Wafer size100 mm (4 inches) or smaller[3]—
Polishing plate materialStainless steel[3]—
Lapping plate materialCast iron[3]—
Sample holding methodVacuum[3]—
Variable plate speedYes[3]—
Slurry delivery methodPeristaltic pump[3]—
Roller arm assemblyYes[3]—
Emergency stopYes[3]—
type—1 spindle grinder/polisher[5]
drive system—DC drive system with 2 motors[5]
spindle RPM—1-180 RPM[5]
eccentric RPM—1-90 RPM[5]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[5]
capacity—16 inches[5]
spindle size—1-8 TPI[5]
overall dimensions—28 inches x 36 inches x 48 inches[5]
weight—500 lbs[5]
origin—made in the USA[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]smif.pratt.duke.edusmif.pratt.duke.edu
  2. [2]web.archive.orgweb.archive.org
  3. [3]manualslib.commanualslib.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]excelltechnology.comexcelltechnology.com