Waferpedia

Comparison ledger

120 Continuousversus7 AF

Lapmaster 120 Continuous, Strasbaugh 7 AF, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
7 AFStrasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousStrasbaugh 7 AF
Specifications
Phase—3 Phase[1]
Frequency—60 Hz[1]
OEM—Strasbaugh[2]
Model—7 AF[2]
Tool type—CMP (Chemical Mechanical Polisher)[2]
Electrical—3 Phase, 60 Hz[1]
Wafer size—200 mm[3]
Tapeless backgrinding support—Yes[3]
Compatible wafer types—Bumped and non-bumped wafers[3]
Power supply—3 Phase, 60 Hz[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]web.archive.orgweb.archive.org