Comparison ledger
Lam Research Rainbow 4420, Nordson March AP 1000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Rainbow 4420Lam Research | March AP 1000Nordson |
|---|---|---|
| OEM | Lam Research | Nordson |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1994 Vintage year | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Rainbow 4420 | Nordson March |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Refurbished[3] | Includes vacuum pump & RF generator[6] |
| Software version | Envision 1.5 Release[2] | — |
| Handler System | Harmonics Arm (2)[2] | — |
| Volts | 208[2] | — |
| Wafer Shape | 8" flat zone[4] | — |
| Process | Poly Etch[4] | — |
| Software | Envision 1.5[4] | — |
| Wafer Aligner | Universal[5] | — |
| Wafer Sizes | 8 inch[2] | — |
| Software Version | Envision 1.5[2] | — |
| CIM SECS | Yes[2] | — |
| Factory Interface | SMIF (2)[2] | — |
| LL Pump | Yes[2] | — |
| TCU 2080 | Yes[2] | — |
| AC Rack | Yes[2] | — |
| PC Pump | Yes[2] | — |
| Vintage | 1994[2] | — |
| Dry Pump | Yes[4] | — |
| Chiller | Yes[4] | — |
| Frequency | — | 50 Hz[1] |
| CB Current | — | 25 A[1] |
| SCCR | — | 10 kA[1] |
| RF Generator Power (optional) | — | 600 W or 1000 W (Seren, 13.6 MHz)[7] |
| Vacuum Pump | — | Included (dry or wet pump options)[8] |
| Power | — | 50 Hz[6] |
| Vacuum | — | Included (dry or wet pump options)[6] |
| RF Generator Power | — | 600 W or 1000 W (Seren, 13.6 MHz)[6] |
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