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IPEC 472versus6 DF DC 1

Lam Research IPEC 472, Strasbaugh 6 DF DC 1, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Documented as functional equivalents— Same function class: CMP, null[1]
Side-by-side comparison of selected equipment models
Attribute
IPEC 472Lam Research
6 DF DC 1Strasbaugh
OEMLam ResearchStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPEC 472Strasbaugh 6 DF DC 1
Specifications
ConfigurationSurface Automated[1]Refurbished[4]
Wafer size6 inch, 8 inch[2]—
CategoryCMP (Chemical Mechanical Polisher / Chemical Mechanical Planarization)[1]—
Make / OEMLam / IPEC[1]—
Model472[1]—
Voltage—230 V, Single Phase, 60 Hz[4]
Full Load—15 A[4]
Motor—8.0 A[4]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing