Waferpedia

Comparison ledger

IPEC 372 Mversus120 Continuous

Lam Research IPEC 372 M, Lapmaster 120 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
IPEC 372 MLam Research
OEMLam ResearchLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPEC 372 MLapmaster 120 Continuous
Specifications
CategoryCMP[1]—
Wafer Size8 inch (200 mm)[1]—
TypeAutomated Wafer Polishing System[2]—
OEMLam Research[1]—
ModelIPEC 372 M[3]—
Wafer sizes8 inch[3]—
Tool typeAutomated wafer polishing system[1]—
Also referred to asIPEC 372M Avanti[1]—

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]Equipment inventory listing