Comparison ledger
Lam Research Gasonics PEP 3510 Plus, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gasonics PEP 3510 PlusLam Research | 1000FPYES |
|---|---|---|
| OEM | Lam Research | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research Gasonics PEP 3510 | YES 1000FP |
| Cited variants |
| — |
| Specifications | ||
| Power | 2 KW MW Generator[2] | — |
| Wafer Size | 8 inch[2] | — |
| MW Generator Power | 2 kW[3] | — |
| System type | — | Plasma cleaning system[4] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[4] |
| Model | — | Glen/YES 1000FP[4] |
| Designed use | — | Designed to accept a range of shelf sizes[4] |
| Application focus | — | Changing needs of the flat panel industry[4] |
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