Comparison ledger
KLA FT 750, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FT 750KLA | 1000 FamilyUltratech |
|---|---|---|
| OEM | KLA | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA FT 750 | Ultratech 1000 Family |
| Specifications | ||
| Gas | no chemicals[1] | — |
| OS | DOS[1] | — |
| Measurement technology | Visible light spectrophotometer[2] | — |
| Operating system | DOS[1] | — |
| Gas chemistry | None (no chemicals)[1] | — |
| Reflectivity mapping | Yes[2] | — |
| Optional gamma curve plotting | Yes[2] | — |
| Applications | CVD, etch, lithography, diffusion[2] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[3] |
| Optical design | — | Wynne Dyson[3] |
| Magnification | — | 1X[3] |
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