Comparison ledger
KLA Archer 10 XT Overlay, Zeiss sem2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | sem2Zeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Archer | Zeiss sem2 |
| Specifications | ||
| Configuration | During refurbishment the loadports were replaced with the cassette loader that is shown in our video below[1] | — |
| Wafer size | 200mm dual port open wafer handler[1] | 200 mm[3] |
| OEM | KLA[2] | Zeiss[3] |
| Model | Archer 10 XT Overlay[2] | sem2[3] |
| Category | Metrology & Inspection[2] | Metrology & Inspection[3] |
| Description | 200mm overlay metrology system[2] | — |
| Software version | 5.6[1] | — |
| Wafer handler | 200mm dual port open wafer handler[1] | — |
| Chuck | 8" chuck[1] | — |
| Computer upgrade | XP computer upgrade[1] | — |
| Computer | KLASS RS2 computer[1] | — |
| Equipment name | — | Zeiss 200 mm Scanning Electron Microscope[3] |
| Equipment type | — | Scanning Electron Microscope[3] |
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