Comparison ledger
KLA .498 PSL Wafer, Onto Innovation MetaPulse 200 Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MetaPulse 200 Film Thickness MeasurementOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1998– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Onto Innovation MetaPulse 200 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 4900 va[2] |
| NIST traceability | Yes[1] | — |
| Voltage | — | 220 VAC[3] |
| Maximum Single Load | — | 5 amps at 220 VAC[3] |
| Wafer size | — | 8 inch[2] |
| Wafer diameter | — | 200 mm[4] |
| Phase | — | Single Phase[3] |
| Frequency | — | 50/60 Hz[3] |
| Power/configuration | — | 4900 va[2] |
| Floppy drives | — | 16 Fla[2] |
| Process | — | Wafer Inspection[4] |
| Year of manufacture | — | 1998[4] |
| Ultrafast laser | — | 800 nm[4] |
| Pattern recognition | — | Included[4] |
| Controller | — | Programmable motion controller[4] |
| Computer platform | — | 266 MHz Pentium II Motherboard[4] |
| Storage | — | 2GB hard drive[4] |
| Optical drive | — | CD ROM drive[4] |
| Display | — | LCD screen[4] |
| Input devices | — | Keyboard and Trackball[4] |
| Interface | — | GEM compliant SECS-II[4] |
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