Comparison ledger
KLA .498 PSL Wafer, KLA eDR 5200 +, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | eDR 5200 +KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA eDR |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | Parts Machine[3] |
| NIST traceability | Yes[2] | — |
| Tool type | — | defect review scanning electron microscope (DR-SEM)[4] |
| Category | — | Metrology & Inspection[5] |
| Version | — | 300 mm[1] |
| Technology summary | — | High resolution imaging for classification of less than 50nm defects[1] |
| EDX capability | — | defects less than 100nm in diameter[1] |
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