Comparison ledger
KLA .498 PSL Wafer, KLA 6420, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6420KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2023 decommissioned |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA 6420 |
| Specifications | ||
| Configuration | NIST Traceable[1] | new laser[2] |
| NIST traceability | Yes[1] | — |
| Manufacturer | — | KLA[3] |
| Model | — | 6420[2] |
| Tool type | — | Inspection System[2] |
| Category | — | Metrology & Inspection[3] |
| Wafer sizes | — | 8 inch[2] |
| Vintage | — | 1997 Vintage[2] |
| Status note | — | software boots; measurement and board functionality noted; laser inoperative[2] |
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