Comparison ledger
KLA .496 PSL Wafer, KLA Surfscan SP 3 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Bare wafer inspection station |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2011– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA Surfscan |
| Specifications | ||
| Configuration | NIST Traceable[1] | HDD not included[3] |
| Wafer size | 8 inch[1] | Bare wafer inspection station[3] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Illumination | — | Deep-ultraviolet (DUV)[3] |
| Wafer loading unit ports | — | 3[3] |
| Haze maps | — | Full-wafer high-resolution[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →