Waferpedia

Comparison ledger

.204 PSL WaferversusAlpha Step IQ Surface

KLA .204 PSL Wafer, KLA Alpha Step IQ Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA Alpha Step
Specifications
ConfigurationNIST Traceable[1]Windows XP[3]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
P/N—0051047-000[3]
Version—2.1.0[3]
Firmware version—1.34[3]
Part Number—0051047-000[3]
Operating System—Windows XP[3]
Software Version—2.1.0[3]
Type—Surface Profilometer[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]Equipment inventory listing