Comparison ledger
KLA 1007, MPI PM100, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | PM100MPI |
|---|---|---|
| OEM | KLA | MPI |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | MPI PM100 |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Equipment | — | MPI TS150 Probe Station[3] |
| Use | — | Electrical testing on wafers or chips[3] |
| Terminal capacity | — | Maximum of 4 independent terminals + additional chuck grounding[3] |
| Wafer compatibility | — | Up to 6 inch wafers[3] |
| Probe positioners | — | MPI PM100 true X,Y,Z micro-positioners[3] |
| Probe tips | — | Interchangeable tungsten (W) contact tips[3] |
| Chuck stage | — | Fine-glide chuck stage on highly stable granite base[3] |
| Travel range | — | 150 mm x 150 mm and 10 mm x 10 mm coarse and fine X-Y travel range[3] |
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