Comparison ledger
KLA 1.112 PSL Wafer, Zeiss Axio, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AxioZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Zeiss Axio |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[4] | with Axiocam MRC camera[6] |
| Wafer Size | 8 inch[4] | — |
| NIST Traceable | True[4] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[5] | — |
| Observation methods | — | brightfield, darkfield[3] |
| Objectives | — | 5x, 10x, 20x, 50x, 100x, 150x[3] |
| Software | — | Zen 2.3 Lite[3] |
| Camera | — | Axiocam MRC[6] |
| Tall sample accommodation | — | custom adjustable armature[3] |
| Manual controls | — | objective turret, XY stage, focusing[3] |
| Type | — | optical microscope[3] |
| Available objectives | — | 5x, 10x, 20x, 50x, 100x, 150x[3] |
| Imaging software | — | Zen 2.3 Lite[3] |
| Stage and controls | — | Manual objective turret, XY stage and focusing[3] |
| Sample height capacity | — | Tall samples can be accommodated[3] |
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