Waferpedia

Comparison ledger

1.112 PSL WaferversusEclipse L 150

KLA 1.112 PSL Wafer, Nikon Eclipse L 150, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
1.112 PSL WaferKLA
Eclipse L 150Nikon
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferNikon Eclipse L 150
Specifications
ConfigurationNIST Traceable[1]—
Wafer Size8 inch[1]6 inch[3]
NIST TraceableTrue[1]—
Compatible ToolsSurfscan 6xy0 and Sp1[2]—
1.112 PSL Wafer entryEclipse L 150 entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing