Comparison ledger
KLA 1.112 PSL Wafer, KLA Surfscan 6420 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1995 Vintage year |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA Surfscan 6420 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Single Phase[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Voltage | — | 220 V[3] |
| Frequency | — | 50 Hz[3] |
| Product type | — | Particle Defect System[3] |
| Manufacturer | — | KLA[3] |
| Electrical input | — | 220 V, 50 Hz, single phase, 16 A[3] |
| Alternative electrical input | — | Single phase, 60 Hz[4] |
| Vintage | — | 1995[3] |
| Phase | — | Single Phase[3] |
| Current | — | 16 A[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →