Comparison ledger
KLA 1.112 PSL Wafer, KLA eDR 5210 DR-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA eDR |
| Specifications | ||
| Configuration | NIST Traceable[1] | 2 Load Port (Brooks FixLoad)[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Wafer size | — | 12 inch (300 mm)[4] |
| Robot & Aligner | — | Brooks[3] |
| TMP | — | Edward[3] |
| Ion pump | — | Varian[3] |
| Vintage | — | 2010[4] |
| Tool type | — | Defect review scanning electron microscope[3] |
| Category | — | Metrology & Inspection[4] |
| Wafer handling | — | Robot & Aligner (Brooks)[3] |
| Vacuum & pumping | — | TMP (Edward); Ion pump (Varian)[3] |
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