Waferpedia

Comparison ledger

5517 Aversus0020 Contour Projector

Keysight 5517 A, OGP 0020 Contour Projector, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
5517 AKeysight
OEMKeysightOGP
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKeysight 5517OGP (Optical Gaging Products) 0020 Contour Projector
Specifications
ConfigurationCompatible with ASML PAS 2500 / 5000 Part Number: 4022 502 25005[1]50-60 Cycle[4]
Compatible with Canon Part NumberBG 9 1304[2]—
Laser typeClass II helium-neon laser[3]—
Wavelength633 nm[3]—
ApplicationPrecision dual-frequency interferometry[3]—
Max linear velocity411 mm/s[3]—
Reference frequency316 MHz[3]—
Min output power1.5 to 2.0 µW[3]—
Warm-up time< 10 minutes[3]—
Laser beam output diameter6 mm[3]—
Mean time between failures (MTBF)> 50,000 hours typical[3]—
Vacuum wavelength stability2 ppb (1 hour); 20 ppb (lifetime)[3]—
Wavelength accuracy± 0.1 ppm standard; ± 0.02 ppm with optional calibration[3]—
Required power supply voltage15 V[3]—
Compatible power supply modelKeysight 10884B supply or equivalent[3]—
Voltage—115 V[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]keysight.comkeysight.com
  4. [4]inventory listing