Waferpedia

Comparison ledger

JEM-100Bversus0035235-003 MMD Head

JEOL JEM-100B, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMJEOLKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyJEOL JEM-100BKLA 0035235-003 MMD Head
Specifications
OEMJEOL[1]—
ModelJEM-100B[1]0035235-003[2]
Equipment typeelectron microscope[1]—
Integrated featureselectromagnetic deflection unit; electromagnetic stigmator[1]—
Instrument typeTransmission electron microscope[1]—
Special featuresElectromagnetic deflection unit and electromagnetic stigmator[1]—
Configuration—TSTD PCB ASSY, MMD MEAS HEAD[2]
Make—KLA[2]
Part Description—TSTD PCB ASSY, MMD MEAS HEAD[2]
Compatible System—KLA AIT-XP[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org
  2. [2]inventory listing