Comparison ledger
JEOL JEM-1, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | JEM-1JEOL | |
|---|---|---|
| OEM | JEOL | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | Transmission electron microscope | — |
| Introduced | 1950 | — |
| Production run | 1950– | — |
| Lifecycle | Legacy | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | JEOL JEM-1 | KLA 1.112 PSL Wafer |
| Specifications | ||
| Equipment type | commercial model transmission electron microscope[1] | — |
| Manufacturer | JEOL[1] | — |
| Type | First commercial model transmission electron microscope[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer Size | — | 8 inch[2] |
| NIST Traceable | — | True[2] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →