Comparison ledger
Hitachi SU8230, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU8230Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi SU8230 | KLA .204 PSL Wafer |
| Specifications | ||
| Role | Cleanroom scanning electron microscope (SEM)[1] | — |
| Facility reference | SEM-10[1] | — |
| Manufacturer | Hitachi[1] | — |
| Model | SU8230[1] | — |
| Training prerequisite note | Qualification on the SEM-10 Hitachi SU8230 is a prerequisite to SP-4 training and access.[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
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