Waferpedia

Comparison ledger

S 9380versus0035235-003 MMD Head

Hitachi S 9380, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
S 9380Hitachi
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi S 9380KLA 0035235-003 MMD Head
Cited variants—
Specifications
ConfigurationSingle Phase[2]TSTD PCB ASSY, MMD MEAS HEAD[3]
Voltage230 V, 50 Hz, 6kVA[2]—
Wafer Size12 inch[2]—
Vintage2005[2]—
Frequency50 Hz[2]—
Power6 kVA[2]—
TypeCD-SEM[1]—
FA-PC Linux Upgrade AvailableYes[1]—
Model—0035235-003[3]
Make—KLA[3]
Part Description—TSTD PCB ASSY, MMD MEAS HEAD[3]
Compatible System—KLA AIT-XP[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]inventory listing