Comparison ledger
Hitachi S 9260 A CD-SEM, Hitachi S 9260 CD-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9260 A CD-SEMHitachi | S 9260 CD-SEMHitachi |
|---|---|---|
| OEM | Hitachi | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9260 | Hitachi S 9260 |
| Specifications | ||
| Configuration | Single phase[1] | Missing parts:[3] |
| Make | Hitachi[2] | — |
| Model | S 9260 A[2] | S 9260[4] |
| Wafer Size | 8 inch[1] | — |
| Power Configuration | Single phase[1] | — |
| Manufacturer | — | Hitachi[4] |
| Tool type | — | Critical Dimension Scanning Electron Microscope (CD-SEM)[4] |
| Asset number | — | 70790[3] |
| Last confirm date | — | April 20, 2023[3] |
| Vintage | — | 2006[3] |
| Missing parts | — | TMP + controllers, HV controller, robot controller[3] |
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