Comparison ledger
Hitachi S 9220 CD-SEM, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9220 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer Transfer Robot: | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9220 | KLA .496 PSL Wafer |
| Specifications | ||
| Power Supply | 208 V, 60 Hz[1] | — |
| Configuration | Single Phase[1] | NIST Traceable[6] |
| Wafer | Notch[2] | — |
| Length Measurement Method | Cursor & Line Profile Method[2] | — |
| Measuring Range | 0.1 μm ～ 2.0 μm[2] | — |
| Length Measurement Reproducibility | ± 1% or 3 nm (3σ) larger value[2] | — |
| Throughput | Continuous measurement mode 56 wafers / hr[2] | — |
| Length Measurement Reproduction Accuracy | 40k-150k-200k times[2] | — |
| Measuring Mode | Automatic & Manual[2] | — |
| Secondary Electron Image Resolution | 3 nm (acceleration voltage 0.8 kV)[2] | — |
| Optical Microscope Image | Approx 110 times[2] | — |
| SEM Image | 1k to 300k times[2] | — |
| Range of Movement | X-axis: 0-200 mm, Y-axis: 0-200 mm[2] | — |
| Drive System | Pulse Motor Drive[2] | — |
| Control | Computer control, positioning control by linear encoder[2] | — |
| Drive Speed | Max. 100 mm / sec (each X-axis & Y-axis)[2] | — |
| Wafer Carrier -> Loader Room | Automatic transfer by wafer transfer robot[2] | — |
| Wafer size | Wafer Transfer Robot:[2] | 8 inch[6] |
| Length Measurement | Cursor & Line Profile Method[3] | — |
| Voltage | 100V[4] | — |
| Frequency | 60 Hz[5] | — |
| Image Magnification (Optical Microscope) | Approx. 110 times[2] | — |
| Image Magnification (SEM Image) | 1k to 300k times[2] | — |
| Stage Movement Range (X-axis) | 0-200 mm[2] | — |
| Stage Movement Range (Y-axis) | 0-200 mm[2] | — |
| Stage Drive Speed | Max. 100 mm / sec (each X-axis & Y-axis)[2] | — |
| Loader System | Automatic transfer by wafer transfer robot; random access type for 2 cassettes; vacuum suction chucking on back side; automatic OF/V-notch detection by optical sensor[2] | — |
| Acceleration Voltage | 500 to 1600 V (variable in 10 V steps)[2] | — |
| Lens System | Electromagnetic Lens System, Booster Stock Lens[2] | — |
| Detection System | Scintillator / photomultiplier detector using EXB filter; 2 stage detection method for SE and BSE images[2] | — |
| Scanning Coil | 2-stage electromagnetic deflection[2] | — |
| Astigmatism Correction | 8-pole electromagnetic system (X, Y)[2] | — |
| Probe Current Monitor | Built-in Faraday cup, with automatic measurement function[2] | — |
| Optical Microscope | Approximately 1.2 mm square field of view, with black and white CCD camera[2] | — |
| Control CRT | EWS (GUI) 21-inch CRT[2] | — |
| Scanning Mode | TV scan, with auto brightness / contrast function[2] | — |
| Image Processing | Software using filtering; real-time image processing (optional) using DSP[2] | — |
| Image Recording | Video printing device (optional) & image file save function (optional)[2] | — |
| Safety Device | With emergency shutoff switch (mushroom type)[2] | — |
| Data Storage Medium | 9G byte hard disk (including for system programs)[2] | — |
| Auxiliary Storage Medium | 3.5-inch magneto-optical disk driver, 3.5-inch F/D driver[2] | — |
| Data Embedding Function | Statistical calculation function using worksheets (mean value, standard deviation, etc.)[2] | — |
| Print Output | 80-digit thermal printer[2] | — |
| Vacuum Exhaust System | Fully automatic dry clean exhaust system; 3 ion pumps, two turbo molecular pumps, 2 dry pumps (supplied)[2] | — |
| Safety Functions | Protection function in the event of a power outage; AIR pressure drop; cooling water flow rate drop (self) with dynamic valve closing function; pump stop function[2] | — |
| Power Supply (208V variant) | 208 V, 60 Hz, Single Phase[1] | — |
| Power Supply (100V variant) | 100V, 60 Hz, Single Phase, 6kVA[4] | — |
| Power Supply (200V variant) | 200V, 60 Hz, Single Phase[5] | — |
| Method | Random access type for 2 cassettes[2] | — |
| Wafer Detection in Cassette | Wafer Searcher Built-in[2] | — |
| Chucking Method | Vacuum suction on the back side of the wafer[2] | — |
| OF, V-notch Detection | Automatic detection by optical sensor[2] | — |
| Traceability | — | NIST Traceable[6] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[6] |
| Category | — | Metrology & Inspection[7] |
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