Comparison ledger
Hitachi S 4800 FE-SEM, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 4800 FE-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 4800 | KLA 0035235-003 MMD Head |
| Specifications | ||
| Configuration | With EDAX[1] | TSTD PCB ASSY, MMD MEAS HEAD[3] |
| Wafer Size | 12 inch[1] | — |
| Source Type | Cold field-emission[2] | — |
| Detectors | STEM and EDX[2] | — |
| Vintage | 2005[1] | — |
| Model | — | 0035235-003[3] |
| Make | — | KLA[3] |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[3] |
| Compatible System | — | KLA AIT-XP[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →