Comparison ledger
Hitachi 1305 BSG 3, SUSS MicroTec AS 8 Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | AS 8 SpraySUSS MicroTec |
|---|---|---|
| OEM | Hitachi | SUSS MicroTec |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SUSS MicroTec AS 8 |
| Specifications | ||
| Configuration | — | Semi Automatic[1] |
| Conformal Coating | — | ensures top edge coverage while avoiding resist accumulation in trenches[1] |
| Dual Dispense System | — | up to two separate spray dispense system to prevent cross-contamination[1] |
| Touchscreen Interface | — | equipped with MMC controller software[1] |
| Programmable Recipes | — | all spray and cleaning parameters can be customized and saved[1] |
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