Comparison ledger
Hitachi 1305 BSG 3, Semitool ST 2700 Dual Stack Spin Rinse, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | ST 2700 Dual Stack Spin RinseSemitool |
|---|---|---|
| OEM | Hitachi | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Semitool ST 2700 Dual Stack Spin Rinse |
| Specifications | ||
| Tool type | — | Dual Stack Spin Rinse Dryer (SRD)[1] |
| Upper unit substrate size | — | 100mm (4")[2] |
| Lower unit substrate size | — | 150mm (6")[2] |
| Rinse RPM | — | around 600[2] |
| Dry RPM | — | 1200[2] |
| Minimum recommended dry time | — | 240s[2] |
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