Comparison ledger
Hitachi 1305 BSG 3, Semitool ST 270 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | ST 270 SRDSemitool |
|---|---|---|
| OEM | Hitachi | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Semitool ST 270 SRD |
| Specifications | ||
| Make | — | Semitool[1] |
| Model | — | ST 270[1] |
| Tool type | — | Spin Rinse Dryer (SRD)[1] |
| Wafer size | — | 4 inch[1] |
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