Comparison ledger
Hitachi 1305 BSG 3, SCREEN SS 80 EX, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | SS 80 EXSCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN SS 80 |
| Specifications | ||
| Phase | — | 3 Phase, 50/60 Hz[1] |
| Configuration | — | supply[1] |
| Tool type | — | Scrubber[1] |
| Wafer size | — | 6 inch[1] |
| Supply | — | 3 Phase, 50/60 Hz[1] |
| Configured units | — | 4 units[1] |
| Jet nozzle configuration | — | 3 units equipped with a jet nozzle[1] |
| Mixed nozzle configuration | — | 1 unit equipped with one jet and one nanospray nozzle[1] |
| Pump configuration | — | 4 high pressure pumps installed for the jet nozzle[1] |
| Nanospray regulation | — | Regulated by the house[1] |
| Vintage | — | 2016[1] |
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