Comparison ledger
Heller 1913 MKIII, Vitronics Soltec XPM 3 1030, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1913 MKIIIHeller | Soltec XPM 3 1030Vitronics |
|---|---|---|
| OEM | Heller | Vitronics |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Heller 1913 | Vitronics Soltec XPM |
| Cited variants | — | |
| Specifications | ||
| Configuration | Removed:[4] | Conveyor Options:[5] |
| Heated zones | 13[3] | — |
| Cool zones | 3[3] | — |
| Heated length | 3560 mm[3] | — |
| Oven length | 5900 mm[3] | — |
| Maximum PCB width | 55.9 cm (22") / optional 61 cm[3] | — |
| Maximum working temperature | 350°C (optional 400°C)[3] | — |
| Process gas options | Air, Nitrogen[3] | — |
| Cleanroom option | Class 1000[3] | — |
| Voltage | — | 400 V[5] |
| Phase | — | 3 Phase[5] |
| Frequency | — | 50 Hz[5] |
| Rail | — | 38 mm / 1.5"[5] |
| Belt | — | 60 mm / 2.38"[5] |
| Power supply | — | 400 V, 3 phase, 50 Hz[5] |
| Conveyor rail width | — | 38 mm / 1.5 in[5] |
| Conveyor belt width | — | 60 mm / 2.38 in[5] |
| XCS edge rail conveyor | — | 18 in [457 mm][5] |
| Atmosphere options | — | N2 atmosphere operation with True N2-AIR switching and PC-controlled multi-port O2 sampling system; also available in AIR atmosphere operation[6] |
| Conveyor control | — | Computer-controlled edge rail/chain lubrication and computer-controlled rail width adjust[5] |
| Cooling system | — | Enhanced Cooling Package 2 (EC2) with 3 zones cooling using fin heat exchangers (integrated on-board re-circulating system) or tube heat exchangers (integrated on-board recirculating chiller)[5] |
| SMEMA interface | — | SMEMA equipment interface and product tracking, single or dual lane (per IPC-SMEMA-9851)[5] |
| Compliance | — | CE European Safety Compliance[5] |
| Host communications | — | CAMX (Computer Aided Manufacturing using XML) host communication software per IPC-2501, providing centralized message broker, open standard information routing, and HTTP interface to pass XML messages[6] |
| Additional options | — | Primary and secondary cell blower speed control, individual cell sensing, integrated exhaust stack filter, high temperature exhaust hose kit, UPS battery back-up system[5] |
| CE Compliance | — | European Safety Compliance[5] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →